Wafer Handling Robot
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A wafer handling system based on a standard industrial
robot designed for a photolightography tool. Active end
effector measurement improved transfer position
repeatability to more than 10X beyond the robot's
baseline performance. The video below shows the
operation of a prototype system.
robot designed for a photolightography tool. Active end
effector measurement improved transfer position
repeatability to more than 10X beyond the robot's
baseline performance. The video below shows the
operation of a prototype system.