5 DOF Wafer Handling Robot
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A 5 DOF wafer handling robot with dual active end effectors
designed from a clean sheet for a photoresist processing
system. The video below shows the operation of several
alpha prototypes.
designed from a clean sheet for a photoresist processing
system. The video below shows the operation of several
alpha prototypes.
Patented multi-stage linear axis allows
large vertical reach with compact collapsed
position. Shown below.
large vertical reach with compact collapsed
position. Shown below.
